SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Optical/Laser Microlithography III - Plasma etching of chrome masks using PBS resist
Bell, Guido, Spierer, H., Pol, VictorVolume:
1264
Year:
1990
Language:
english
DOI:
10.1117/12.20225
File:
PDF, 651 KB
english, 1990