![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Metal/Nonmetal Microsystems: Physics, Technology, and Applications - Polanica Zdroj, Poland (Monday 11 September 1995)] Metal/Nonmetal Microsystems: Physics, Technology, and Applications - FTIR study of oxygen precipitation in high-pressure-treated Cz-Si contaminated by transition metals
Surma, B., Misiuk, Andrzej, Mozdzonek, Malgorzata, Hartwig, Juergen, Prieur, E., Licznerski, Benedykt W., Dziedzic, AndrzejVolume:
2780
Year:
1996
Language:
english
DOI:
10.1117/12.238147
File:
PDF, 337 KB
english, 1996