SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Optimization of CMOS infrared detector microsystems
Schneeberger, Niklaus, Paul, Oliver, Baltes, Henry, Chau, Kevin H., Roop, Ray M.Volume:
2882
Year:
1996
Language:
english
DOI:
10.1117/12.250695
File:
PDF, 2.10 MB
english, 1996