SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] High Heat Flux and Synchrotron Radiation Beamlines - Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics
Graber, Timothy, Krasnicki, S. F., Fernandez, Patricia B., Mills, Dennis M., Tong, Qin-Yi, Goesele, Ulrich M., Macrander, Albert T., Khounsary, Ali M.Volume:
3151
Year:
1997
Language:
english
DOI:
10.1117/12.294498
File:
PDF, 632 KB
english, 1997