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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - New sensor for real-time trench depth monitoring in micromachining applications
Amary, Pascal, Benferhat, Ramdane, Liddane, Kevin J., Ostrovsky, Alain, Smith, James H., Karam, Jean MichelVolume:
3874
Year:
1999
Language:
english
DOI:
10.1117/12.361223
File:
PDF, 824 KB
english, 1999