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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining Technology for Micro-Optics - Fabrication of microlens arrays in CaF2 by ion milling
Flamm, Dieter, Schindler, Axel, Harzendorf, Torsten, Kley, Ernst-Bernhard, Lee, Sing H., Johnson, Eric G.Volume:
4179
Year:
2000
Language:
english
DOI:
10.1117/12.395680
File:
PDF, 1.01 MB
english, 2000