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SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - SPICE modeling of liquid capacitance in micromachined silicon capillaries
Rainey, Paul V., Mitchell, S. J. N., Gamble, Harold S., Behringer, Uwe F. W., Uttamchandani, Deepak G.Volume:
4407
Year:
2001
Language:
english
DOI:
10.1117/12.425334
File:
PDF, 87 KB
english, 2001