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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II - Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool
Boher, Pierre, Piel, Jean-Philippe, Stehle, Jean-Louis P., Pickering, Christopher, Tarnowka, Alexandre, Duparre, Angela, Singh, BhanwarVolume:
4449
Year:
2001
Language:
english
DOI:
10.1117/12.450081
File:
PDF, 219 KB
english, 2001