SPIE Proceedings [SPIE International Symposium on Optical...

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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II - Combined metrology including VUV spectroscopic ellipsometer and grazing x-ray reflectance for precise characterization of thin films and multilayers at 157 nm

Boher, Pierre, Evrard, Patrick, Piel, Jean-Philippe, Stehle, Jean-Louis P., Duparre, Angela, Singh, Bhanwar
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Volume:
4449
Year:
2001
Language:
english
DOI:
10.1117/12.450107
File:
PDF, 261 KB
english, 2001
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