SPIE Proceedings [SPIE Shanghai - DL tentative - Shanghai,...

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SPIE Proceedings [SPIE Shanghai - DL tentative - Shanghai, China (Monday 1 April 1991)] International Conference on Thin Film Physics and Applications - SPAT studies of near-surface defects in silicon induced by BF2+ and F++B+ implantation

Li, Xiao Q., Lin, Chenglu, Zou, Shichang, Weng, Hui M., Han, Xue D., Zhou, Shixun, Wang, Yongling
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Volume:
1519
Year:
1991
Language:
english
DOI:
10.1117/12.47292
File:
PDF, 107 KB
english, 1991
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