SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Fusion-bonded multilayer SOI for MEMS applications
Somasundram, Kumaresa, Chiao, Jung-Chih, Varadan, Vijay K., Cole, David, McNamara, Cormac, Can, Carles, Boyle, Anne, McCann, Paul, Devine, Claire, Nevin, AndrewVolume:
5116
Year:
2003
Language:
english
DOI:
10.1117/12.502741
File:
PDF, 203 KB
english, 2003