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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Reliability, Testing, and Characterization of MEMS/MOEMS III - Multifunctional interferometric platform for on-chip testing of the micromechanical properties of MEMS/MOEMS
Gorecki, Christophe, Tanner, Danelle M., Ramesham, Rajeshuni, Jozwik, Michal, Salbut, Leszek A.Volume:
5343
Year:
2004
Language:
english
DOI:
10.1117/12.524324
File:
PDF, 844 KB
english, 2004