SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - 100-nm-scale electroplated nickel stamper fabricated by e-beam lithography on chrome/quartz mask
Choi, Doo-Sun, Chiao, Jung-Chih, Jamieson, David N., Yoo, Yeong-Eun, Seo, Young Ho, Faraone, Lorenzo, Dzurak, Andrew S., Lee, Joon-Hyoung, Je, Tae-Jin, Whang, Kyung-HyunVolume:
5650
Year:
2004
Language:
english
DOI:
10.1117/12.568816
File:
PDF, 440 KB
english, 2004