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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS and Miniaturized Systems V - Micromirrors: overview and application roadmap
Bouchaud, Jeremie, El-Fatatry, Ayman, Bahle, Carsten, Wicht, HenningVolume:
5719
Year:
2005
Language:
english
DOI:
10.1117/12.588975
File:
PDF, 53 KB
english, 2005