SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MEMS/MOEMS Components and Their Applications II - Electrostatic microrelays with adjustable parameters
Mukhurov, Nikolay I., Henning, Albert K., Efremov, Georgiy I.Volume:
5717
Year:
2005
Language:
english
DOI:
10.1117/12.591441
File:
PDF, 154 KB
english, 2005