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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 22 January 2005)] Photon Processing in Microelectronics and Photonics IV - High-precision high-speed separation of semiconductor substrates
Sercel, Jeffrey P., Fieret, Jim, Herman, Peter R., Okada, Tatsuo, Arnold, Craig B., Bachmann, Friedrich G., Hoving, Willem, Washio, Kunihiko, Lu, Yongfeng, Geohegan, David B., Trager, Frank, Dubowski,Volume:
5713
Year:
2005
Language:
english
DOI:
10.1117/12.597773
File:
PDF, 103 KB
english, 2005