SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 6 March 2005)] Smart Structures and Materials 2005: Industrial and Commercial Applications of Smart Structures Technologies - Miniature thin-film NiTi hydraulic actuator with MEMS microvalves
McKnight, Geoff, White, Edward V., Momoda, Leslie, Croft, Don, Lee, Dong G., Shin, Daniel, Carman, GregVolume:
5762
Year:
2005
Language:
english
DOI:
10.1117/12.607307
File:
PDF, 3.74 MB
english, 2005