SPIE Proceedings [SPIE Merida - DL Tentative - Merida,...

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SPIE Proceedings [SPIE Merida - DL Tentative - Merida, Mexico (Monday 14 February 2005)] Eighth International Symposium on Laser Metrology - Accurate and highly resolving quadri-wave lateral shearing interferometer, from visible to IR

Velghe, Sabrina, Rodriguez-Vera, R., Mendoza-Santoyo, F., Primot, Jerome, Guerineau, Nicolas, Haidar, Riad, Cohen, Mathieu, Wattellier, Benoit
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Volume:
5776
Year:
2005
Language:
english
DOI:
10.1117/12.611606
File:
PDF, 1.06 MB
english, 2005
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