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SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Advances in Metrology for X-Ray and EUV Optics - Metrology for the development of high-energy x-ray optics
Gubarev, Mikhail, Assoufid, Lahsen, Takacs, Peter Z., Ramsey, Brian, Engelhaupt, Darell, Taylor, John S., Speegle, Chet, Smithers, MartinVolume:
5921
Year:
2005
Language:
english
DOI:
10.1117/12.621170
File:
PDF, 1.08 MB
english, 2005