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SPIE Proceedings [SPIE SPIE 31st International Symposium on...

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SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Metrology, Inspection, and Process Control for Microlithography XX - Critical dimension AFM tip characterization and image reconstruction applied to the 45-nm node

Dahlen, Gregory, Archie, Chas N., Osborn, Marc, Liu, Hao-Chih, Jain, Rohit, Foreman, William, Osborne, Jason R.
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Volume:
6152
Year:
2006
Language:
english
DOI:
10.1117/12.656848
File:
PDF, 1.64 MB
english, 2006
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