SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - Theory and simulation of MEMS deformable mirror
Yan, Jinliang, Esashi, Masayoshi, Zhou, Zhaoying, Zhao, Yinnv, Yu, Fen, Zhu, Youliang, Zhang, HongzhaoVolume:
6032
Year:
2005
Language:
english
DOI:
10.1117/12.667868
File:
PDF, 236 KB
english, 2005