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SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Advances in Metrology for X-Ray and EUV Optics II - Systematic error reduction: non-tilted reference beam method for long trace profiler

Qian, Shinan, Assoufid, Lahsen, Takacs, Peter Z., Qian, Kun, Hong, Yiling, Ohtsuka, Masaru, Sheng, Liusi, Ho, Tonglin, Takacs, Peter
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Volume:
6704
Year:
2007
Language:
english
DOI:
10.1117/12.740440
File:
PDF, 892 KB
english, 2007
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