SPIE Proceedings [SPIE 27th Annual BACUS Symposium on...

  • Main
  • SPIE Proceedings [SPIE 27th Annual...

SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - PMJ 2007 panel discussion overview: double exposure and double patterning for 32-nm half-pitch design node

Nagaoka, Yoshinori, Naber, Robert J., Kawahira, Hiroichi, Watanabe, Hidehiro
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6730
Year:
2007
Language:
english
DOI:
10.1117/12.752596
File:
PDF, 385 KB
english, 2007
Conversion to is in progress
Conversion to is failed