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SPIE Proceedings [SPIE SPIE LASE: Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 24 January 2009)] Laser-based Micro- and Nanopackaging and Assembly III - Optical characterization of the heat-affected zone in laser patterning of thin film a-Si:H
Molpeceres, Carlos L., Pfleging, Wilhelm, Lu, Yongfeng, Colina, Monica, Holgado, Miguel, Washio, Kunihiko, Hoving, Willem, Morales, Miguel, Sanchez-Aniorte, Isabel, Amako, Jun, Lauzurica, Sara, GarciaVolume:
7202
Year:
2009
Language:
english
DOI:
10.1117/12.809514
File:
PDF, 5.22 MB
english, 2009