SPIE Proceedings [SPIE International Conference on Optical Instrumentation and Technology - Shanghai, China (Monday 19 October 2009)] 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications - Study on electroforming Ni-Fe alloy microstructure
Zhou, Zhaoying, Zheng, Xiaohu, Liu, Yuanwei, Fukuda, Toshio, Seidel, Helmut, Gu, Feng, Li, Xinxin, Zhang, Haixia, Cui, TianhongVolume:
7510
Year:
2009
Language:
english
DOI:
10.1117/12.836958
File:
PDF, 1.56 MB
english, 2009