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SPIE Proceedings [SPIE Scanning Microscopy 2010 - Monterey, California (Monday 17 May 2010)] Scanning Microscopy 2010 - Performance of a combined chromatic confocal microscope with thin film reflectometer
Hirth, Florian, Postek, Michael T., Newbury, Dale E., Buck, Thorbjörn C., Steinhausen, Natasha, Platek, S. Frank, Joy, David C., Koch, Alexander W.Volume:
7729
Year:
2010
Language:
english
DOI:
10.1117/12.853517
File:
PDF, 860 KB
english, 2010