SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 12 August 2012)] Nanoengineering: Fabrication, Properties, Optics, and Devices IX - Selectively patterned metal nanodots fabrication by combining block copolymer self-assembly and electron beam lithography
Suzuki, Hiroyuki, Kometani, Reo, Ishihara, Sunao, Warisawa, Shin'ichi, Dobisz, Elizabeth A., Eldada, Louay A.Volume:
8463
Year:
2012
Language:
english
DOI:
10.1117/12.929615
File:
PDF, 554 KB
english, 2012