(Invited) Wafer Bow and Warpage

Japanese Journal of Applied Physics 1981 / 01 Vol. 20; Iss. S1

(Invited) Wafer Bow and Warpage

Takasu, Shin'Ichiro, Otsuka, Hideo, Yoshihiro, Naotsugu, Oku, Taiji
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Volume:
20
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.20S1.25
Date:
January, 1981
File:
PDF, 802 KB
1981
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