Rapid fabrication of a silicon modification layer on silicon carbide substrate
Bai, Yang, Li, Longxiang, Xue, Donglin, Zhang, XuejunVolume:
55
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.55.005814
Date:
August, 2016
File:
PDF, 1.40 MB
english, 2016