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Porous Silicon: From Formation to Applications: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three || Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices

Korotcenkov, Ghenadii
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Volume:
10.1201/b1
Year:
2016
Language:
english
DOI:
10.1201/b19042-9
File:
PDF, 3.65 MB
english, 2016
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