RCWA-EIS method for interlayer grating coupling
Wan, Congshan, Gaylord, Thomas K., Bakir, Muhannad S.Volume:
55
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.55.005900
Date:
August, 2016
File:
PDF, 869 KB
english, 2016