High-resolution and wide-bandwidth light intensity fiber optic displacement sensor for MEMS metrology
Orłowska, Karolina, Świątkowski, Michał, Kunicki, Piotr, Kopiec, Daniel, Gotszalk, TeodorVolume:
55
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.55.005960
Date:
August, 2016
File:
PDF, 1.33 MB
english, 2016