The use of x-ray capillary optics for lithography and microscopy
V. A. Arkadiev, H. -E. Gorny, D. I. Gruev, A. A. Karnaukhov, A. I. Kolomiitsev, M. A. Kumakhov, N. Langhoff, D. V. Shandintsev, R. WedellVolume:
28
Language:
english
Pages:
6
DOI:
10.1007/bf00385862
Date:
March, 1996
File:
PDF, 306 KB
english, 1996