Effects of annealing pressure and Ar+ sputtering cleaning on Al-doped ZnO films
Wang, Jiwei, Mei, Yong, Lu, Xuemei, Fan, Xiaoxing, Kang, Dawei, Xu, Panfeng, Tan, TianyaVolume:
387
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.06.069
Date:
November, 2016
File:
PDF, 1.14 MB
english, 2016