SPIE Proceedings [SPIE Fourth International Symposium on Precision Mechanical Measurements - Anhui, China (Monday 25 August 2008)] Fourth International Symposium on Precision Mechanical Measurements - Error analysis of 2-D diffraction grating interferometer for high-resolution displacement measurement
Xia, Haojie, Fei, Yetai, Fan, Kuang-Chao, Fei, Yetai, Zhang, Mei, Lu, RongshengVolume:
7130
Year:
2008
Language:
english
DOI:
10.1117/12.819742
File:
PDF, 344 KB
english, 2008