International Journal of Precision Engineering and Manufacturing-Green Technology
2016 / 7 Vol. 3; Iss. 3
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Effect of platen shape on evolution of total thickness variation in single-sided lapping of sapphire wafer
Lee, Taekyung, Jeong, Haedo, Kim, Hyoungjae, Lee, Sangjik, Kim, DoyeonVolume:
3
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing-Green Technology
DOI:
10.1007/s40684-016-0029-z
Date:
July, 2016
File:
PDF, 438 KB
english, 2016