A study of intrinsic amorphous silicon thin film deposited...

A study of intrinsic amorphous silicon thin film deposited on flexible polymer substrates by magnetron sputtering

Liu, Kun, Yao, Wenhao, Wang, Dongyang, Ba, Dechun, Liu, Hailong, Gu, Xiaoguang, Meng, Donghui, Du, Guangyu, Xie, Yuanhua, Ba, Yaoshuai
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Volume:
449
Language:
english
Journal:
Journal of Non-Crystalline Solids
DOI:
10.1016/j.jnoncrysol.2016.07.019
Date:
October, 2016
File:
PDF, 2.49 MB
english, 2016
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