Initially curved microplates under electrostatic actuation: theory and experiment
Saghir, S, Bellaredj, M L, Ramini, A, Younis, M IVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/095004
Date:
September, 2016
File:
PDF, 2.04 MB
english, 2016