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AACVD of Molybdenum Sulfide and Oxide Thin Films From Molybdenum(V)-based Single-source Precursors **
Savjani, Nicky, Brent, Jack R., O'Brien, PaulVolume:
21
Language:
english
Journal:
Chemical Vapor Deposition
DOI:
10.1002/cvde.201407135
Date:
March, 2015
File:
PDF, 1.13 MB
english, 2015