Patterning of Solid Films via Selective Atomic Layer Deposition Based on Silylation and UV/Ozonolysis
Guo, Lei, Lee, Ilkeun, Zaera, FranciscoVolume:
8
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.6b07192
Date:
August, 2016
File:
PDF, 4.17 MB
english, 2016