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Passive vibration compensation in scanning white-light interferometry
Tereschenko, Stanislav, Lehmann, Peter, Zellmer, Lisa, Brueckner-Foit, AngelikaVolume:
55
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.55.006172
Date:
August, 2016
File:
PDF, 2.37 MB
english, 2016