Hydrogenated Silicon Nitride SiN...

Plasma Processes and Polymers 2016 / 01 Vol. 13; Iss. 1

Hydrogenated Silicon Nitride SiN x :H Deposited by Dielectric Barrier Discharge for Photovoltaics

Massines, Françoise, Silva, José, Lelièvre, Jean-François, Bazinette, Rémy, Vallade, Julien, Lecouvreur, Paul, Pouliquen, Sylvain
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Volume:
13
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201500182
Date:
January, 2016
File:
PDF, 1.62 MB
english, 2016
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