Modeling and characterization of piezoelectric beams based...

physica status solidi (a) 2016 / 01 Vol. 213; Iss. 1

Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer

Herth, Etienne, Algré, Emmanuelle, Rauch, Jean-Yves, Gerbedoen, Jean-Claude, Defrance, Nicolas, Delobelle, Patrick
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Volume:
213
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201532302
Date:
January, 2016
File:
PDF, 664 KB
english, 2016
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