A Top-Down Fabrication Process for Vertical Hollow Silicon...

Journal of Microelectromechanical Systems 2016 / 8 Vol. 25; Iss. 4

A Top-Down Fabrication Process for Vertical Hollow Silicon Nanopillars

He, Yuan, Che, Xiangchen, Que, Long
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Volume:
25
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2016.2582341
Date:
August, 2016
File:
PDF, 1.22 MB
english, 2016
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