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Microlens fabrication by 3D electron beam lithography combined with thermal reflow technique
Grigaliūnas, Viktoras, Lazauskas, Algirdas, Jucius, Dalius, Viržonis, Darius, Abakevičienė, Brigita, Smetona, Saulius, Tamulevičius, SigitasVolume:
164
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.07.003
Date:
October, 2016
File:
PDF, 2.37 MB
english, 2016