Planar microlens with front-face angle: design,...

Planar microlens with front-face angle: design, fabrication, and characterization

Al Hafiz, Md. Abdullah, Michael, Aron, Kwok, Chee-Yee
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Volume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.15.3.035501
Date:
July, 2016
File:
PDF, 2.12 MB
english, 2016
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