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Influence of RF power on structural optical and electrical...

Journal of Materials Science: Materials in Electronics 2016 / 12 Vol. 27; Iss. 12

Influence of RF power on structural optical and electrical properties of hydrogenated nano-crystalline silicon (nc-Si:H) thin films deposited by PE-CVD

Jadhavar, Ashok, Pawbake, Amit, Waykar, Ravindra, Waman, Vaishali, Rondiya, Sachin, Shinde, Omkar, Kulkarni, Rupali, Rokade, Avinash, Bhorde, Ajinkya, Funde, Adinath, Patil, Dinkar, Pathan, Habib, Jad
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Volume:
27
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-016-5024-1
Date:
December, 2016
File:
PDF, 1.24 MB
english, 2016
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