Fabrication of single-crystal silicon nanotubes with sub-10...

Nanotechnology 2016 / 09 Vol. 27; Iss. 36

Fabrication of single-crystal silicon nanotubes with sub-10 nm walls using cryogenic inductively coupled plasma reactive ion etching

Li, Zhiqin, Chen, Yiqin, Zhu, Xupeng, Zheng, Mengjie, Dong, Fengliang, Chen, Peipei, Xu, Lihua, Chu, Weiguo, Duan, Huigao
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
27
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/27/36/365302
Date:
September, 2016
File:
PDF, 5.07 MB
english, 2016
Conversion to is in progress
Conversion to is failed