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Experiment and simulation study of laser dicing silicon with water-jet
Bao, Jiading, Long, Yuhong, Tong, Youqun, Yang, Xiaoqing, Zhang, Bin, Zhou, ZupengVolume:
387
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.06.135
Date:
November, 2016
File:
PDF, 3.99 MB
english, 2016