Influence of Negative Bias Voltage on Structural and Mechanical Properties of Nanocrystalline TiNx Thin Films Treated in Hot Cathode Arc Discharge Plasma System
Singh, Omveer, Malik, Hitendra K., Dahiya, Raj P., Kumar, ParmodLanguage:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2016.08.032
Date:
August, 2016
File:
PDF, 1.14 MB
english, 2016